Invention Grant
- Patent Title: Double sidewall image transfer process
- Patent Title (中): 双侧壁图像传输过程
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Application No.: US14461745Application Date: 2014-08-18
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Publication No.: US09105510B2Publication Date: 2015-08-11
- Inventor: Youngtag Woo , Jongwook Kye , Dinesh Somasekhar
- Applicant: GLOBALFOUNDRIES Inc.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee Address: KY Grand Cayman
- Agency: Ditthavong & Steiner, P.C.
- Main IPC: H01L21/8234
- IPC: H01L21/8234 ; H01L27/11 ; H01L21/308 ; H01L27/088 ; H01L21/8238

Abstract:
Methodology enabling a generation of fins having a variable fin pitch less than 40 nm, and the resulting device are disclosed. Embodiments include: forming a hardmask on a substrate; providing first and second mandrels on the hardmask; providing a first spacer on each side of each of the first and second mandrels; removing the first and second mandrels; providing, after removal of the first and second mandrels, a second spacer on each side of each of the first spacers; and removing the first spacers.
Public/Granted literature
- US20140353765A1 DOUBLE SIDEWALL IMAGE TRANSFER PROCESS Public/Granted day:2014-12-04
Information query
IPC分类: