Invention Grant
- Patent Title: Method and system of improved uniformity testing
- Patent Title (中): 改进均匀性测试的方法和系统
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Application No.: US13713421Application Date: 2012-12-13
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Publication No.: US09105563B2Publication Date: 2015-08-11
- Inventor: Charlene Chen , Tony P. Chiang , Chi-I Lang , Yun Wang
- Applicant: Intermolecular, Inc.
- Applicant Address: US CA San Jose
- Assignee: Intermolecular, Inc.
- Current Assignee: Intermolecular, Inc.
- Current Assignee Address: US CA San Jose
- Main IPC: G01N21/59
- IPC: G01N21/59 ; H01L21/66 ; H01L29/16 ; H01L21/02

Abstract:
A method and system includes a first substrate and a second substrate, each substrate comprising a predetermined baseline transmittance value at a predetermine wavelength of light, processing regions on the first substrate by combinatorially varying at least one of materials, process conditions, unit processes, and process sequences associated with the graphene production, performing a first characterization test on the processed regions on the first substrate to generate first results, processing regions on a second substrate in a combinatorial manner by varying at least one of materials, process conditions, unit processes, and process sequences associated with the graphene production based on the first results of the first characterization test, performing a second characterization test on the processed regions on the second substrate to generate second results, and determining whether at least one of the first substrate and the second substrate meet a predetermined quality threshold based on the second results.
Public/Granted literature
- US20130122614A1 Method and System of Improved Uniformity Testing Public/Granted day:2013-05-16
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