发明授权
- 专利标题： Floating sheet production apparatus and method
- 专利标题（中）： 浮板生产设备及方法
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申请号： US12948248申请日： 2010-11-17
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公开(公告)号： US09112064B2公开(公告)日： 2015-08-18
- 发明人: Peter L. Kellerman , Frank Sinclair
- 申请人： Peter L. Kellerman , Frank Sinclair
- 申请人地址： US MA Gloucester
- 专利权人： Varian Semiconductor Equipment Associates, Inc.
- 当前专利权人： Varian Semiconductor Equipment Associates, Inc.
- 当前专利权人地址： US MA Gloucester
- 主分类号： C30B15/30
- IPC分类号： C30B15/30 ; H01L31/02 ; C30B15/06 ; C30B15/14 ; C30B28/10 ; C30B29/06
摘要：
This sheet production apparatus comprises a vessel defining a channel configured to hold a melt. The melt is configured to flow from a first point to a second point of the channel. A cooling plate is disposed proximate the melt and is configured to form a sheet on the melt. A spillway is disposed at the second point of the channel. This spillway is configured to separate the sheet from the melt.
公开/授权文献
- US20110117234A1 FLOATING SHEET PRODUCTION APPARATUS AND METHOD 公开/授权日：2011-05-19