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US09116350B2 MEMS scanning mirror field of view provision methods and apparatus 有权
MEMS扫描镜视野提供方法和装置

MEMS scanning mirror field of view provision methods and apparatus
Abstract:
Embodiments of the present disclosure provide techniques and configurations for an optoelectronic assembly including a MEMS scanning mirror. In one embodiment, the MEMS scanning mirror may include a micro-scale mirror configured to be rotatable about a chord axis of the mirror to deflect an incident light beam into an exit window of the optoelectronic assembly, and a support structure configured to host the mirror to provide a light delivery field between a mirror surface and the exit window such that a path of the deflected light beam via the provided light delivery field to the exit window is un-obstructed. Other embodiments may be described and/or claimed.
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