Invention Grant
- Patent Title: MEMS scanning mirror field of view provision methods and apparatus
- Patent Title (中): MEMS扫描镜视野提供方法和装置
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Application No.: US13997986Application Date: 2013-03-11
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Publication No.: US09116350B2Publication Date: 2015-08-25
- Inventor: Barak Freedman , Arnon Hirshberg
- Applicant: INTEL CORPORATION
- Applicant Address: US CA Santa Clara
- Assignee: INTEL CORPORATION
- Current Assignee: INTEL CORPORATION
- Current Assignee Address: US CA Santa Clara
- Agency: Schwabe Williamson & Wyatt PC
- International Application: PCT/US2013/030286 WO 20130311
- International Announcement: WO2014/142794 WO 20140918
- Main IPC: G02B26/10
- IPC: G02B26/10 ; G02B26/08

Abstract:
Embodiments of the present disclosure provide techniques and configurations for an optoelectronic assembly including a MEMS scanning mirror. In one embodiment, the MEMS scanning mirror may include a micro-scale mirror configured to be rotatable about a chord axis of the mirror to deflect an incident light beam into an exit window of the optoelectronic assembly, and a support structure configured to host the mirror to provide a light delivery field between a mirror surface and the exit window such that a path of the deflected light beam via the provided light delivery field to the exit window is un-obstructed. Other embodiments may be described and/or claimed.
Public/Granted literature
- US20140253992A1 MEMS SCANNING MIRROR FIELD OF VIEW PROVISION METHODS AND APPARATUS Public/Granted day:2014-09-11
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