发明授权
- 专利标题: Manufacturing method of light barrier glass sheet
- 专利标题(中): 防光玻璃板的制造方法
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申请号: US14352805申请日: 2013-06-17
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公开(公告)号: US09116383B2公开(公告)日: 2015-08-25
- 发明人: Zheng Liu , Seung Min Lee , Seung Moo Rim , Huibin Guo
- 申请人: BOE TECHNOLOGY GROUP CO., LTD. , BEIJING BOE DISPLAY TECHNOLOGY CO., LTD.
- 申请人地址: CN Beijing CN Beijing
- 专利权人: BOE TECHNOLOGY GROUP CO., LTD.,BEIJING BOE DISPLAY TECHNOLOGY CO., LTD.
- 当前专利权人: BOE TECHNOLOGY GROUP CO., LTD.,BEIJING BOE DISPLAY TECHNOLOGY CO., LTD.
- 当前专利权人地址: CN Beijing CN Beijing
- 代理机构: Ladas & Parry LLP
- 优先权: CN201310145991 20130424
- 国际申请: PCT/CN2013/077319 WO 20130617
- 国际公布: WO2014/172969 WO 20141030
- 主分类号: H01B13/00
- IPC分类号: H01B13/00 ; G02F1/1335 ; H01L27/12
摘要:
A manufacturing method of a light barrier glass sheet, comprising: farming a metal layer (2) on a glass substrate (1); coating a first photoresist layer (3) on the metal layer (2), performing first exposure on the first photoresist layer (3) through a half tone mask, then performing first development on the first photoresist layer (3); removing partial region of the metal layer (2) through a first etching process; removing a partial thickness and a partial region of the first photoresist layer (3) through an ashing process; forming an insulating layer (4) on the exposed glass substrate (1), the exposed metal layer (2), the first photoresist layer (3) after the ashing process, and sidewalls of the photoresist layer (3) after the ashing process; removing the first photoresist layer (3), the insulating layer (4) on the first photoresist layer (3), and the insulating layer (4) on the sidewalls of the first photoresist layer (3) by a photoresist lifting-off process so as to form a via hole (7); forming a transparent pixel electrode pattern (5) in the via hole (7), on sidewalls of the via hole (7) and on the insulating layer (4). With the method, one mask process can be omitted, thus the manufacturing process can be simplified, the production efficiency can be improved and the production cost can be reduced.
公开/授权文献
- US20150144589A1 MANUFACTURING METHOD OF LIGHT BARRIER GLASS SHEET 公开/授权日:2015-05-28
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