发明授权
- 专利标题: Development processing apparatus
- 专利标题(中): 开发处理装置
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申请号: US13778928申请日: 2013-02-27
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公开(公告)号: US09116431B2公开(公告)日: 2015-08-25
- 发明人: Masatoshi Terayama , Hideaki Sakurai
- 申请人: Kabushiki Kaisha Toshiba
- 申请人地址: JP Tokyo
- 专利权人: KABUSHIKI KAISHA TOSHIBA
- 当前专利权人: KABUSHIKI KAISHA TOSHIBA
- 当前专利权人地址: JP Tokyo
- 代理机构: Finnegan, Henderson, Farabow, Garrett & Dunner, LLP
- 优先权: JP2012-124786 20120531
- 主分类号: G03D5/00
- IPC分类号: G03D5/00 ; G03F7/20 ; G03F7/30
摘要:
According to one embodiment, a development processing apparatus including a film reduction amount calculation unit configured to calculate a film reduction amount of a to-be-exposed portion of the photosensitive film, a dimension prediction unit configured to calculate predicted pattern dimension when the developing process is performed in a standard development condition, a dimension correction amount calculation unit configured to calculate a pattern dimension correction amount, a corrected development condition derivation unit configured to derive a corrected development condition based on the calculated pattern dimension correction amount, and a developing mechanism configured to develop the photosensitive film in the derived corrected development condition.
公开/授权文献
- US20130321784A1 DEVELOPMENT PROCESSING APPARATUS 公开/授权日:2013-12-05
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