发明授权
- 专利标题: Optical module for guiding a radiation beam
- 专利标题(中): 用于引导辐射束的光学模块
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申请号: US14243515申请日: 2014-04-02
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公开(公告)号: US09116440B2公开(公告)日: 2015-08-25
- 发明人: Markus Hauf , Severin Waldis , Wilfried Noell , Yves Petremend , Marco Jassmann , Lothar Kulzer , Caglar Ataman
- 申请人: Carl Zeiss SMT GmbH
- 申请人地址: DE Oberkochen
- 专利权人: Carl Zeiss SMT GmbH
- 当前专利权人: Carl Zeiss SMT GmbH
- 当前专利权人地址: DE Oberkochen
- 代理机构: Fish & Richardson P.C.
- 优先权: DE102008052153 20081020; DE102009009568 20090219; DE102009034502 20090724
- 主分类号: G02B5/08
- IPC分类号: G02B5/08 ; G03B27/42 ; G03B27/54 ; G03F7/20 ; G02B7/18 ; G02B26/08
摘要:
An optical module includes a chamber capable of being evacuated and a mirror in the chamber. The mirror includes a plurality of individual mirrors. Each individual mirror includes: a mirror body including a reflection face; a support structure; and a thermally conductive portion that mechanically connects the support structure to the mirror body. For at least one individual mirror, the thermally conductive portion includes a plurality of thermally conductive strips arranged radially, adjacent thermally conductive strips being separated from each other, and each of the plurality of thermally conductive strips connecting the mirror body to the support structure. For at least one individual mirror, an actuator is associated with the mirror body, the actuator being configured to displace the mirror body relative to the support structure in at least one degree of freedom.
公开/授权文献
- US20140211187A1 OPTICAL MODULE FOR GUIDING A RADIATION BEAM 公开/授权日:2014-07-31
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