A planar ion funnel is disclosed that can be used for ion control. In one application, the planar ion funnel can be used for ion control in a mass spectrometer. The planar ion funnel can be formed on a surface of a substantially planar substrate including an orifice. An electrically conductive structure can be formed on a top surface of the substrate that surrounds the orifice. In operation, a power can be applied to the conductive structure that causes an electric field to be generated that draws ions into and through the orifice. In one embodiment, the orifice can be circular and the conductive structure can be a series of nested rings of increasing diameter surrounding the orifice.