Invention Grant
- Patent Title: Multi-axial acceleration sensor and method of manufacturing the same
- Patent Title (中): 多轴加速度传感器及其制造方法
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Application No.: US13962955Application Date: 2013-08-09
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Publication No.: US09117871B2Publication Date: 2015-08-25
- Inventor: Wei-Chung Wang
- Applicant: PixArt Imaging Inc.
- Applicant Address: TW Science-Based Industrial Park, Hsin-Chu
- Assignee: PixArt Imaging Inc.
- Current Assignee: PixArt Imaging Inc.
- Current Assignee Address: TW Science-Based Industrial Park, Hsin-Chu
- Agent Winston Hsu; Scott Margo
- Priority: TW102105910A 20130220
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L23/00 ; G01P15/18
Abstract:
The present invention provides a multi-axial acceleration sensor and a method of manufacturing the multi-axial acceleration sensor. The method includes: providing a substrate having a lead plane; disposing a first sensor chip onto the lead plane, wherein a wire bonding plane of the first sensor chip is perpendicular to the lead plane; and disposing a second sensor chip onto the lead plane, wherein a wire bonding plane of the second sensor chip is in parallel with the lead plane.
Public/Granted literature
- US20140231935A1 MULTI-AXIAL ACCELERATION SENSOR AND METHOD OF MANUFACTURING THE SAME Public/Granted day:2014-08-21
Information query
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