发明授权
- 专利标题: Pixel structures of CMOS imaging sensors
- 专利标题(中): CMOS成像传感器的像素结构
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申请号: US14685905申请日: 2015-04-14
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公开(公告)号: US09123606B2公开(公告)日: 2015-09-01
- 发明人: Yan Wei , Hualong Song , Yanchun Ma
- 申请人: Semiconductor Manufacturing International (Beijing) Corporation , Semiconductor Manufacturing International (Shanghai) Corporation
- 申请人地址: CN Beijing CN Shanghai
- 专利权人: Semiconductor Manufacturing International (Beijing) Corporation,Semiconductor Manufacturing International (Shanghai) Corporation
- 当前专利权人: Semiconductor Manufacturing International (Beijing) Corporation,Semiconductor Manufacturing International (Shanghai) Corporation
- 当前专利权人地址: CN Beijing CN Shanghai
- 代理机构: Anova Law Group, PLLC
- 优先权: CN201310461748 20130930
- 主分类号: H01L27/146
- IPC分类号: H01L27/146 ; H01L29/06 ; H01L29/16 ; H01L31/028
摘要:
A method is provided for fabricating a pixel structure of a CMOS transistor. The method includes providing a semiconductor substrate doped with first type doping ions; and forming a trench in the semiconductor substrate by etching the semiconductor substrate. The method also includes forming isolation layers on side surfaces of the trench to prevent dark current from laterally transferring; and forming an epitaxial layer doped with second type doping ions with a doping type opposite to a doping type of the first type doping ions in the trench. Further, the method includes forming a pinning layer on a top surface of the epitaxial layer; and forming a gate structure on a surface of the semiconductor substrate at one side of the epitaxial layer. Further, the method also includes forming a floating diffusion region in the semiconductor substrate at one side of the gate structure far from the epitaxial layer.
公开/授权文献
- US20150221686A1 PIXEL STRUCTURES OF CMOS IMAGING SENSORS 公开/授权日:2015-08-06
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