Invention Grant
US09123618B2 Method for producing image pickup apparatus, and method for producing semiconductor apparatus 有权
图像拾取装置的制造方法以及半导体装置的制造方法

Method for producing image pickup apparatus, and method for producing semiconductor apparatus
Abstract:
A method for producing an image pickup apparatus includes: a process of fabricating a plurality of image pickup chips by cutting an image pickup chip substrate where light receiving sections and electrode pads are formed; a process of fabricating a joined wafer by bonding the image pickup chips to a glass wafer; a process of filling a gap between the plurality of image pickup chips with a sealing member; a process of machining the joined wafer to reduce a thickness; a process of forming through-hole vias; a process of forming an insulating layer that covers the image pickup chips; a process of forming through-hole interconnections; a process of forming external connection electrodes, each of which is connected to each of the through-hole interconnections; and a process of cutting the joined wafer.
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