Invention Grant
US09123618B2 Method for producing image pickup apparatus, and method for producing semiconductor apparatus
有权
图像拾取装置的制造方法以及半导体装置的制造方法
- Patent Title: Method for producing image pickup apparatus, and method for producing semiconductor apparatus
- Patent Title (中): 图像拾取装置的制造方法以及半导体装置的制造方法
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Application No.: US14557021Application Date: 2014-12-01
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Publication No.: US09123618B2Publication Date: 2015-09-01
- Inventor: Kazuhiro Yoshida , Noriyuki Fujimori , Takatoshi Igarashi
- Applicant: OLYMPUS CORPORATION
- Applicant Address: JP Tokyo
- Assignee: OLYMPUS CORPORATION
- Current Assignee: OLYMPUS CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Scully, Scott, Murphy & Presser, P.C.
- Priority: JP2012-123225 20120530
- Main IPC: H01L21/66
- IPC: H01L21/66 ; H01L27/146 ; H01L25/04 ; H01L21/56 ; H01L21/768 ; H01L21/78

Abstract:
A method for producing an image pickup apparatus includes: a process of fabricating a plurality of image pickup chips by cutting an image pickup chip substrate where light receiving sections and electrode pads are formed; a process of fabricating a joined wafer by bonding the image pickup chips to a glass wafer; a process of filling a gap between the plurality of image pickup chips with a sealing member; a process of machining the joined wafer to reduce a thickness; a process of forming through-hole vias; a process of forming an insulating layer that covers the image pickup chips; a process of forming through-hole interconnections; a process of forming external connection electrodes, each of which is connected to each of the through-hole interconnections; and a process of cutting the joined wafer.
Public/Granted literature
- US20150087086A1 METHOD FOR PRODUCING IMAGE PICKUP APPARATUS, AND METHOD FOR PRODUCING SEMICONDUCTOR APPARATUS Public/Granted day:2015-03-26
Information query
IPC分类: