Invention Grant
US09123790B2 Contact techniques and configurations for reducing parasitic resistance in nanowire transistors 有权
用于减小纳米线晶体管寄生电阻的接触技术和配置

Contact techniques and configurations for reducing parasitic resistance in nanowire transistors
Abstract:
Embodiments of the present disclosure provide contact techniques and configurations for reducing parasitic resistance in nanowire transistors. In one embodiment, an apparatus includes a semiconductor substrate, an isolation layer formed on the semiconductor substrate, a channel layer including nanowire material formed on the isolation layer to provide a channel for a transistor, and a contact coupled with the channel layer, the contact being configured to surround, in at least one planar dimension, nanowire material of the channel layer and to provide a source terminal or drain terminal for the transistor.
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