Invention Grant
- Patent Title: Method for manufacturing photoelectric conversion device and a solid-state imaging device having a photoelectric conversion device formed in accordance with the method
- Patent Title (中): 制造光电转换装置的方法和具有根据该方法形成的光电转换装置的固态成像装置
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Application No.: US13851842Application Date: 2013-03-27
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Publication No.: US09123858B2Publication Date: 2015-09-01
- Inventor: Tetsuro Mitsui , Yuki Kuramoto
- Applicant: FUJIFILM CORPORATION
- Applicant Address: JP Tokyo
- Assignee: FUJIFILM Corporation
- Current Assignee: FUJIFILM Corporation
- Current Assignee Address: JP Tokyo
- Agency: Studebaker & Brackett PC
- Priority: JP2010-216104 20100927; JP2011-169649 20110802; JP2011-211330 20110927
- Main IPC: H01L31/18
- IPC: H01L31/18 ; H01L27/30 ; H01L27/146

Abstract:
A method for manufacturing a photoelectric conversion device including a first process where a plurality of pixel electrodes are formed on a dielectric layer; a second process where a light receiving layer that includes an organic material is formed on the plurality of pixel electrodes; and a third process where a counter electrode is formed on the light receiving layer. The first process includes a film forming process of a pixel electrode material on the dielectric layer; a patterning process of the film of the pixel electrode material; and a heating process for heating the substrate at 270° C. after the patterning process. Such process forming a photoelectric conversion device of a solid-state imaging device which also includes a signal reading circuit formed on the substrate, the signal reading circuit capable of reading out the signal according to a quantity of electric charges collected in the first electrode.
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