Invention Grant
- Patent Title: Thin film transistor array panel and manufacturing method thereof
- Patent Title (中): 薄膜晶体管阵列面板及其制造方法
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Application No.: US14090487Application Date: 2013-11-26
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Publication No.: US09123873B2Publication Date: 2015-09-01
- Inventor: Jeong Min Park , Ji-Hyun Kim , Jung-Soo Lee , Sung Kyun Park
- Applicant: Samsung Display Co., Ltd.
- Applicant Address: KR
- Assignee: Samsung Display Co., Ltd.
- Current Assignee: Samsung Display Co., Ltd.
- Current Assignee Address: KR
- Agency: Innovation Counsel LLP
- Priority: KR10-2013-0002982 20130110
- Main IPC: H01L31/112
- IPC: H01L31/112 ; H01L33/58 ; G02F1/1345 ; G02F1/1362

Abstract:
Instead of forming contact holes the same way in both the non-image forming peripheral area (PA) and the image forming display area of a thin film transistor array panel, contact holes in the DA are formed to be substantially smaller than those in the PA for thereby improving an aperture ratio of the corresponding display device. In an exemplary embodiment, an inorganic gate insulating layer is not etched in the DA and only an inorganic first passivation layer among inorganic insulating layers positioned in the DA is etched to allow communication between the drain electrode and the corresponding field generating electrode. On the other hand, in the peripheral area, plural inorganic insulating layers such as the gate insulating layer, the first passivation layer, and the second passivation layer positioned on the gate wire and the data wire are simultaneously etched to form second contact holes and third contact holes exposing respective gate pads and data pads.
Public/Granted literature
- US20140191256A1 THIN FILM TRANNSISTOR ARRAY PANEL AND MANUFACTURING METHOD THEREOF Public/Granted day:2014-07-10
Information query
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