发明授权
- 专利标题: Polishing pad
- 专利标题(中): 抛光垫
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申请号: US13639475申请日: 2011-04-07
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公开(公告)号: US09126304B2公开(公告)日: 2015-09-08
- 发明人: Tsuyoshi Kimura
- 申请人: Tsuyoshi Kimura
- 申请人地址: JP Osaka
- 专利权人: TOYO TIRE & RUBBER CO., LTD.
- 当前专利权人: TOYO TIRE & RUBBER CO., LTD.
- 当前专利权人地址: JP Osaka
- 代理机构: Law Office of Katsuhiro Arai
- 优先权: JP2010-094318 20100415
- 国际申请: PCT/JP2011/058778 WO 20110407
- 国际公布: WO2011/129254 WO 20111020
- 主分类号: B24B37/20
- IPC分类号: B24B37/20 ; B24B37/22
摘要:
An object of the present invention is to provide a polishing pad which enables high accuracy optical end-point detection in a state where polishing is carrying out, and which can prevent slurry leakage from a polishing layer to a cushion layer even in the case of being used for a long period. Another object is to provide a method for producing a semiconductor device using the polishing pad. The present invention relates to a polishing pad in which a polishing layer having a polishing region and a light-transmitting region, and a cushion layer having a through hole are laminated via a double-sided adhesive sheet such that the light-transmitting region and the through hole are laid one upon another, wherein a transparent member is stuck on an adhesive layer of the double-sided adhesive sheet in the through hole.
公开/授权文献
- US20130017769A1 POLISHING PAD 公开/授权日:2013-01-17
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