Invention Grant
- Patent Title: Phase change memory structures and methods
- Patent Title (中): 相变记忆结构和方法
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Application No.: US14051212Application Date: 2013-10-10
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Publication No.: US09130163B2Publication Date: 2015-09-08
- Inventor: Sanh D. Tang
- Applicant: Micron Technology, Inc
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Agency: Brooks, Cameron & Huebsch, PLLC
- Main IPC: H01L45/00
- IPC: H01L45/00 ; H01L27/24 ; G11C13/00

Abstract:
A method of forming a phase change material memory cell includes forming a number of memory structure regions, wherein the memory structure regions include a bottom electrode material and a sacrificial material, forming a number of insulator regions between the number of memory structure regions, forming a number of openings between the number of insulator regions and forming a contoured surface on the number of insulator regions by removing the sacrificial material and a portion of the number of insulator regions, forming a number of dielectric spacers on the number of insulator regions, forming a contoured opening between the number of insulator regions and exposing the bottom electrode material by removing a portion of the number of dielectric spacers, and forming a phase change material in the opening between the number of insulator regions.
Public/Granted literature
- US20140097399A1 PHASE CHANGE MEMORY STRUCTURES AND METHODS Public/Granted day:2014-04-10
Information query
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