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US09131896B2 In situ offset compensation for pressure sensors 有权
压力传感器原位补偿补偿

In situ offset compensation for pressure sensors
摘要:
A pressure sensor having a substrate and a first, deformable membrane, partially supported by the substrate, which generates a first sensor reading when deformed by pressure. A second membrane is contiguous to the first membrane. When the second membrane is energized, it deforms the first membrane to alter the first sensor reading.
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