发明授权
- 专利标题: In situ offset compensation for pressure sensors
- 专利标题(中): 压力传感器原位补偿补偿
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申请号: US12853364申请日: 2010-08-10
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公开(公告)号: US09131896B2公开(公告)日: 2015-09-15
- 发明人: Juergen Burger , Toralf Bork
- 申请人: Juergen Burger , Toralf Bork
- 申请人地址: CH
- 专利权人: MEDOS INTERNATIONAL S.A.R.L.
- 当前专利权人: MEDOS INTERNATIONAL S.A.R.L.
- 当前专利权人地址: CH
- 主分类号: A61B5/00
- IPC分类号: A61B5/00 ; G01L19/02 ; G01L27/00 ; A61B5/03
摘要:
A pressure sensor having a substrate and a first, deformable membrane, partially supported by the substrate, which generates a first sensor reading when deformed by pressure. A second membrane is contiguous to the first membrane. When the second membrane is energized, it deforms the first membrane to alter the first sensor reading.
公开/授权文献
- US20110040206A1 IN SITU OFFSET COMPENSATION FOR PRESSURE SENSORS 公开/授权日:2011-02-17
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