发明授权
- 专利标题： Composite crucible, method of manufacturing the same, and method of manufacturing silicon crystal
- 专利标题（中）： 复合坩埚及其制造方法以及硅晶体的制造方法
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申请号： US13394268申请日： 2010-08-20
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公开(公告)号： US09133063B2公开(公告)日： 2015-09-15
- 发明人: Toshiaki Sudo , Takuma Yoshioka , Hiroshi Kishi , Takeshi Fujita , Minoru Kanda , Koichi Suzuki , Ken Kitahara
- 申请人： Toshiaki Sudo , Takuma Yoshioka , Hiroshi Kishi , Takeshi Fujita , Minoru Kanda , Koichi Suzuki , Ken Kitahara
- 申请人地址： JP Tokyo
- 专利权人： SUMCO CORPORATION
- 当前专利权人： SUMCO CORPORATION
- 当前专利权人地址： JP Tokyo
- 代理机构： Law Office of Katsuhiro Arai
- 优先权： JP2009-208606 20090909
- 国际申请： PCT/JP2010/064056 WO 20100820
- 国际公布： WO2011/030658 WO 20110317
- 主分类号： C30B15/10
- IPC分类号： C30B15/10 ; C03B19/02 ; C03B20/00 ; C04B41/50 ; C03B19/09 ; C04B35/185 ; C04B41/00 ; C04B41/86 ; C30B29/06 ; C30B35/00
摘要：
The purpose of the present invention is to provide a crucible which has high viscosity at high temperature, and can be used for a long time, and can be manufactured at low cost, and a method of manufacturing the same. The composite crucible 10 is characterized in the use of mullite (3Al2O3.2SiO2) as the basic material of the crucible. The composite crucible 10 has the crucible body 11 made of mullite material whose main component is alumina and silica, and a transparent vitreous silica layer 12 formed on the inner surface of the crucible body 11. The thickness of the transparent vitreous silica layer 12 is smaller than that of the crucible body 11. The crucible body 11 can be formed by the slip casting method, and the transparent vitreous silica layer 12 can be formed by the thermal spraying method.