Invention Grant
- Patent Title: Displacement detecting device, scale calibrating method and scale calibrating program
- Patent Title (中): 位移检测装置,刻度校准方法和刻度校准程序
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Application No.: US13659213Application Date: 2012-10-24
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Publication No.: US09134144B2Publication Date: 2015-09-15
- Inventor: Akihide Kimura
- Applicant: MITUTOYO CORPORATION
- Applicant Address: JP Kawasaki-Shi
- Assignee: MITUTOYO CORPORATION
- Current Assignee: MITUTOYO CORPORATION
- Current Assignee Address: JP Kawasaki-Shi
- Agency: Rankin, Hill & Clark LLP
- Priority: JP2011-233748 20111025
- Main IPC: G01D5/34
- IPC: G01D5/34 ; G01D5/244

Abstract:
A displacement detecting device includes: a scale which has an optical lattice; a detecting unit which is disposed so as to be movable in a scanning direction relative to the scale, inclusive of at least a first detection portion, a second detection portion and a third detection portion, arranged in the scanning direction for detecting position information from the optical lattice; and a calculating portion configured to obtain a self-calibration curve on graduations of the scale by specifying positions of the detection portions and calculating measurement error based on the position information detected by the detecting unit, wherein: the detecting unit is provided so that a distance between the first detection portion and the second detection portion and a distance between the second detection portion and the third detection portion are different from each other and do not form an integral multiple.
Public/Granted literature
- US20130099106A1 DISPLACEMENT DETECTING DEVICE, SCALE CALIBRATING METHOD AND SCALE CALIBRATING PROGRAM Public/Granted day:2013-04-25
Information query
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