Invention Grant
US09134211B2 Surface shape measuring device 有权
表面形状测量装置

Surface shape measuring device
Abstract:
A surface shape measuring device includes a substrate, an electrode portion including at least one electrode pattern, the electrode pattern extending on the substrate, a coating layer on the substrate to cover the electrode pattern, and a detector electrically connected to the electrode pattern and detecting a change in a physical quantity of the electrode pattern generated by the deformation of the substrate or the coating layer by an external load applied thereto.
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