Invention Grant
- Patent Title: Surface shape measuring device
- Patent Title (中): 表面形状测量装置
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Application No.: US13852806Application Date: 2013-03-28
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Publication No.: US09134211B2Publication Date: 2015-09-15
- Inventor: Young-Ho Cho , Jae-Min Kim , Dae-Geon Seo
- Applicant: Korea Advanced Institute of Science and Technology
- Applicant Address: KR Daejeon
- Assignee: KOREA ADVANCED INSTITUTE OF SCIENCE AND TECHNOLOGY
- Current Assignee: KOREA ADVANCED INSTITUTE OF SCIENCE AND TECHNOLOGY
- Current Assignee Address: KR Daejeon
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: KR10-2012-0033105 20120330
- Main IPC: G01B7/24
- IPC: G01B7/24 ; G01N3/08 ; G01B7/16 ; G01L1/00 ; A61B5/053

Abstract:
A surface shape measuring device includes a substrate, an electrode portion including at least one electrode pattern, the electrode pattern extending on the substrate, a coating layer on the substrate to cover the electrode pattern, and a detector electrically connected to the electrode pattern and detecting a change in a physical quantity of the electrode pattern generated by the deformation of the substrate or the coating layer by an external load applied thereto.
Public/Granted literature
- US20130255396A1 SURFACE SHAPE MEASURING DEVICE Public/Granted day:2013-10-03
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