Invention Grant
US09136366B2 Transistor with coupled gate and ground plane 有权
具有耦合栅极和接地层的晶体管

Transistor with coupled gate and ground plane
Abstract:
An integrated circuit includes a silicon substrate, a ground plane above the substrate, a buried insulator layer above the ground plane, a silicon layer above the buried insulator layer and separated from the ground plane by the buried insulator layer, and an FDSOI transistor. The transistor has a channel adapted for being formed in the silicon layer, a source and drain in and/or on the silicon layer, and a gate covering an upper face of the channel and having a lateral portion covering a lateral face of the channel and above the ground plane. A distance between the lateral portion and the ground plane is not more than three nanometers and at least five times less than a thickness of the buried insulator layer between the ground plane and the silicon layer. The ground plane is separated from the gate by the buried insulator layer.
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