Invention Grant
- Patent Title: Linear motor magnetic shield apparatus for lithographic systems
- Patent Title (中): 用于光刻系统的线性电机磁屏蔽装置
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Application No.: US13617543Application Date: 2012-09-14
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Publication No.: US09136751B2Publication Date: 2015-09-15
- Inventor: Kalyan Kumar Mankala , Roberto Bernardo Wiener , Pradeep Kumar Govil , Andrew Nelson
- Applicant: Kalyan Kumar Mankala , Roberto Bernardo Wiener , Pradeep Kumar Govil , Andrew Nelson
- Applicant Address: NL Veldhoven
- Assignee: ASML Holding N.V.
- Current Assignee: ASML Holding N.V.
- Current Assignee Address: NL Veldhoven
- Agency: Sterne, Kessler, Goldstein & Fox P.L.L.C.
- Main IPC: H02K41/03
- IPC: H02K41/03 ; H02K11/00

Abstract:
A magnetic shield having non-magnetic gaps provides reduced magnetic cross-talk for a linear motor array in a precision positioning system. Redirecting the leakage flux limits the cross-talk and associated deleterious effects. Such preferred magnetic circuit paths for the leakage are affixed to the moving magnet system of the linear motor. Embodiments of the preferred flux leakage paths are realized by providing a ferromagnetic shield separated by a non-magnetic gap between the permanent magnets and the back-irons. In another embodiment, the ferromagnetic shield separation includes diamagnetic materials.
Public/Granted literature
- US20130010273A1 Linear Motor Magnetic Shield Apparatus Public/Granted day:2013-01-10
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