Invention Grant
- Patent Title: Test apparatus for reflective cavity characterization
- Patent Title (中): 用于反射腔表征的测试装置
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Application No.: US14543649Application Date: 2014-11-17
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Publication No.: US09140647B2Publication Date: 2015-09-22
- Inventor: Joseph M. Ranish , Joseph Johnson , Mehran Behdjat
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: APPLIED MATERIALS, INC.
- Current Assignee: APPLIED MATERIALS, INC.
- Current Assignee Address: US CA Santa Clara
- Agency: Patterson & Sheridan, LLP
- Main IPC: G01N21/55
- IPC: G01N21/55 ; G01N21/47

Abstract:
An apparatus for reflectivity measurement is provided. The apparatus generally measures reflectivity characteristics of a reflective surface, such as a reflective cavity of a light array. The apparatus generally comprises a body defining a volume and a light emitting element disposed outside the volume. A sensor coupled to the body detects light reflected from a reflective surface. Various embodiments provide positioning of the apparatus relative to a light array having a reflective cavity.
Public/Granted literature
- US20150070686A1 TEST APPARATUS FOR REFLECTIVE CAVITY CHARACTERIZATION Public/Granted day:2015-03-12
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