Invention Grant
- Patent Title: Apparatus for CMP pad conditioning
- Patent Title (中): CMP垫调节装置
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Application No.: US13227155Application Date: 2011-09-07
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Publication No.: US09149906B2Publication Date: 2015-10-06
- Inventor: Hsiu-Ming Yeh , Feng-Inn Wu
- Applicant: Hsiu-Ming Yeh , Feng-Inn Wu
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Haynes and Boone, LLP
- Main IPC: B24B53/017
- IPC: B24B53/017 ; B24B53/12

Abstract:
A chemical mechanical polishing (CMP) apparatus is provided that includes a conditioning disc for conditioning a polishing pad of the CMP apparatus. The conditioning disc includes a plurality of portions of subsystem discs. The portions may be regions of the disc that are concentric. Each portion of the disc is operable to rotate at a different angular velocity. In some embodiments, a different applied loading is provided to each of the portions of the disc in addition to or in lieu of the different angular velocities.
Public/Granted literature
- US20130059503A1 METHOD OF AND APPARATUS FOR CMP PAD CONDITIONING Public/Granted day:2013-03-07
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