发明授权
US09151408B2 Method of polishing a metal surface of a barrier door of a gate valve used in a semiconductor cluster tool architecture
有权
在半导体集群工具架构中使用的闸阀的阻挡门的金属表面的抛光方法
- 专利标题： Method of polishing a metal surface of a barrier door of a gate valve used in a semiconductor cluster tool architecture
- 专利标题（中）： 在半导体集群工具架构中使用的闸阀的阻挡门的金属表面的抛光方法
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申请号： US13482278申请日： 2012-05-29
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公开(公告)号： US09151408B2公开(公告)日： 2015-10-06
- 发明人: Dean J. Larson , James A. Woodward
- 申请人： Dean J. Larson , James A. Woodward
- 申请人地址： US CA Fremont
- 专利权人： LAM RESEARCH CORPORATION
- 当前专利权人： LAM RESEARCH CORPORATION
- 当前专利权人地址： US CA Fremont
- 主分类号： B32B38/10
- IPC分类号： B32B38/10 ; F16K51/02 ; F16K3/02 ; B24B15/00 ; B24B29/00
摘要：
The method of preserving the anodized finish of a barrier door of a process module includes bonding a seal to a metal surface, anodizing the metal surface, and then using a CNC machine to polish the metal surface without damaging the seal. The metal surface is polished by traversing a polishing path along the metal surface with a polishing head maintaining frictional contact with the metal surface. The integrity of the seal is preserved by bounding the polishing head to skirt the edge of the seal by following the polishing path.
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