Invention Grant
- Patent Title: Methods of forming a pattern on a substrate
- Patent Title (中): 在基板上形成图案的方法
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Application No.: US14064261Application Date: 2013-10-28
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Publication No.: US09153458B2Publication Date: 2015-10-06
- Inventor: Scott L. Light , Anton deVilliers
- Applicant: Micron Technology, Inc.
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Agency: Wells St. John, P.S.
- Main IPC: H01L21/311
- IPC: H01L21/311 ; H01L21/033

Abstract:
A method of forming a pattern on a substrate includes forming a repeating pattern of four first lines elevationally over an underlying substrate. A repeating pattern of four second lines is formed elevationally over and crossing the repeating pattern of four first lines. First alternating of the four second lines are removed from being received over the first lines. After the first alternating of the four second lines have been removed, elevationally exposed portions of alternating of the four first lines are removed to the underlying substrate using a remaining second alternating of the four second lines as a mask. Additional embodiments are disclosed and contemplated.
Public/Granted literature
- US20140051251A1 Methods Of Forming a Pattern on a Substrate Public/Granted day:2014-02-20
Information query
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