发明授权
- 专利标题: Semiconductor constructions
- 专利标题(中): 半导体结构
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申请号: US13485884申请日: 2012-05-31
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公开(公告)号: US09153497B2公开(公告)日: 2015-10-06
- 发明人: Mark Kiehlbauch
- 申请人: Mark Kiehlbauch
- 申请人地址: US ID Boise
- 专利权人: Micron Technology, Inc.
- 当前专利权人: Micron Technology, Inc.
- 当前专利权人地址: US ID Boise
- 代理机构: Wells St. John P.S.
- 主分类号: H01L27/108
- IPC分类号: H01L27/108 ; H01L29/94 ; H01L21/8234 ; H01L21/768 ; H01L29/78
摘要:
Some embodiments include methods in which a pair of spaced-apart adjacent features is formed over a substrate. The features have silicon dioxide surfaces. Silicon nitride is deposited between the features. A first region of the silicon nitride is protected with a mask while a second region is not. The second region is removed to form an opening between the features. Some embodiments include semiconductor constructions that contain a pair of spaced-apart adjacent features. The features are lines extending along a first direction, and are spaced from one another by a trench. Alternating plugs and intervening materials are within the trench, with the plugs and intervening materials alternating along the first direction. The intervening materials consist of silicon nitride, and the plugs have lateral peripheries that directly contact silicon dioxide of the features, and that directly contact silicon nitride of the intervening regions.
公开/授权文献
- US20120235217A1 Semiconductor Constructions 公开/授权日:2012-09-20
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