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US09159669B2 Nanotube structure based metal damascene process 有权
纳米管结构基金属镶嵌工艺

Nanotube structure based metal damascene process
Abstract:
In various embodiments a method for manufacturing a metallization layer on a substrate is provided, wherein the method may include forming a plurality of groups of nanotubes over a substrate, wherein the groups of nanotubes may be arranged such that a portion of the substrate is exposed and forming metal over the exposed portion of the substrate between the plurality of groups of nanotubes.
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