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US09163965B2 Microflowmeter and method for making same 有权
微流量计及其制作方法

Microflowmeter and method for making same
Abstract:
A flowmeter includes a first chamber and a second chamber connected through a channel. The first chamber is provided with a first deformable membrane and with first and second gauges. The second chamber is provided with a second deformable membrane and with third and fourth gauges. The four gauges form a Wheatstone bridge.
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