Invention Grant
US09164123B2 Micromechanical rotary acceleration sensor and method for detecting a rotary acceleration
有权
微机械式旋转加速度传感器及旋转加速度检测方法
- Patent Title: Micromechanical rotary acceleration sensor and method for detecting a rotary acceleration
- Patent Title (中): 微机械式旋转加速度传感器及旋转加速度检测方法
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Application No.: US13453425Application Date: 2012-04-23
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Publication No.: US09164123B2Publication Date: 2015-10-20
- Inventor: Reinhard Neul , Torsten Ohms , Mirko Hattass , Daniel Christoph Meisel
- Applicant: Reinhard Neul , Torsten Ohms , Mirko Hattass , Daniel Christoph Meisel
- Applicant Address: DE Stuttgart
- Assignee: Robert Bosch GmbH
- Current Assignee: Robert Bosch GmbH
- Current Assignee Address: DE Stuttgart
- Agency: Maginot, Moore & Beck LLP
- Priority: DE102011017603 20110427
- Main IPC: G01P15/00
- IPC: G01P15/00 ; G01P15/097
Abstract:
The disclosure relates to a micromechanical rotary acceleration sensor including a substrate with at least one anchoring device and at least two flywheel masses. At least one of the flywheel masses is connected to at least one anchoring device by means of a coupling element. The at least one anchoring device is designed in such a manner that the at least two flywheel masses are elastically deflectable from a respective rest position about at least one axis of rotation. The at least two flywheel masses is designed in such a manner that they have different natural frequencies.
Public/Granted literature
- US20120272735A1 Micromechanical Rotary Acceleration Sensor and Method for Detecting a Rotary Acceleration Public/Granted day:2012-11-01
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