Invention Grant
US09165376B2 System, method and computer readable medium for detecting edges of a pattern
有权
用于检测图案边缘的系统，方法和计算机可读介质
- Patent Title: System, method and computer readable medium for detecting edges of a pattern
- Patent Title (中): 用于检测图案边缘的系统，方法和计算机可读介质
-
Application No.: US13837896Application Date: 2013-03-15
-
Publication No.: US09165376B2Publication Date: 2015-10-20
- Inventor: Ishai Schwartzband , Roman Kris , Shimon Levi
- Applicant: APPLIED MATERIALS ISRAEL, LTD.
- Applicant Address: IL Rehovot
- Assignee: Applied Materials Israel Ltd.
- Current Assignee: Applied Materials Israel Ltd.
- Current Assignee Address: IL Rehovot
- Agency: Kilpatrick Townsend & Stockton LLP
- Main IPC: G06K9/00
- IPC: G06K9/00 ; G06T7/40 ; G06T5/00
Abstract:
A system, a non-transitory computer readable medium and a method for detecting a parameter of a pattern, the method comprises: obtaining an image of the pattern; wherein the image is generated by scanning the pattern with a charged particle beam; processing the image to provide an edge enhanced image; wherein the processing comprises computing an aggregate energy of first n spectral components of the image, wherein n exceeds two; and further processing the edge enhanced image and determining a parameter of the pattern.
Public/Granted literature
- US20140270470A1 SYSTEM, METHOD AND COMPUTER READABLE MEDIUM FOR DETECTING EDGES OF A PATTERN Public/Granted day:2014-09-18
Information query
