发明授权
- 专利标题: Arc source and magnet configuration
- 专利标题(中): 电弧源和磁铁配置
-
申请号: US11747999申请日: 2007-05-14
-
公开(公告)号: US09165749B2公开(公告)日: 2015-10-20
- 发明人: Siegfried Krassnitzer , Jürg Hagmann , Juergen Gwehenberger
- 申请人: Siegfried Krassnitzer , Jürg Hagmann , Juergen Gwehenberger
- 申请人地址: CH Truebbach
- 专利权人: OERLIKON TRADING AG, TRUEBBACH
- 当前专利权人: OERLIKON TRADING AG, TRUEBBACH
- 当前专利权人地址: CH Truebbach
- 代理机构: Notaro, Michalos & Zaccaria P.C.
- 优先权: CH792/06 20060516
- 主分类号: C23C14/56
- IPC分类号: C23C14/56 ; C23C14/32 ; H01J37/32 ; H01J37/34
摘要:
The invention relates to an arc source with a target (1) having a target front face (2) for the vacuum vaporization of the target material, a target backside with a cooling plate (4), a central target region (Z) as well as a target margin. The arc source further comprises a magnet configuration (8, 9) with an inner magnet system (8) and/or an outer magnet system (9) for the generation of a magnetic field in the proximity of the target front face. At least one of the magnet systems (8) is herein radially poled and effects alone or in connection with the particular other magnet system that the field lines of the magnetic field extend here substantially parallel to the target front face (2).
公开/授权文献
- US20080110749A1 Arc source and magnet configuration 公开/授权日:2008-05-15
信息查询
IPC分类: