Invention Grant
- Patent Title: Uniform critical dimension size pore for PCRAM application
- Patent Title (中): PCRAM应用的均匀临界尺寸孔隙
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Application No.: US14174777Application Date: 2014-02-06
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Publication No.: US09166165B2Publication Date: 2015-10-20
- Inventor: Matthew J. Breitwisch , Roger W. Cheek , Chung H. Lam , Hsiang-Lan Lung , Eric A. Joseph , Alejandro G. Schrott
- Applicant: International Business Machines Corporation , Macronix International Co., Ltd.
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agent Ido Tuchman; Vazken Alexanian
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L45/00

Abstract:
A memory cell and a method of making the same, that includes insulating material deposited on a substrate, a bottom electrode formed within the insulating material, a plurality of insulating layers deposited above the bottom electrode and at least one of which acts as an intermediate insulating layer. A via is defined in the insulating layers above the intermediate insulating layer. A channel is created for etch with a sacrificial spacer. A pore is defined in the intermediate insulating layer. All insulating layers above the intermediate insulating layer are removed, and the entirety of the remaining pore is filled with phase change material. An upper electrode is formed above the phase change material.
Public/Granted literature
- US20140154862A1 UNIFORM CRITICAL DIMENSION SIZE PORE FOR PCRAM APPLICATION Public/Granted day:2014-06-05
Information query
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