发明授权
US09167680B2 Plasma processing apparatus, plasma generating apparatus, antenna structure and plasma generating method
有权
等离子体处理装置,等离子体发生装置,天线结构和等离子体产生方法
- 专利标题: Plasma processing apparatus, plasma generating apparatus, antenna structure and plasma generating method
- 专利标题(中): 等离子体处理装置,等离子体发生装置,天线结构和等离子体产生方法
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申请号: US14011860申请日: 2013-08-28
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公开(公告)号: US09167680B2公开(公告)日: 2015-10-20
- 发明人: Yohei Yamazawa , Takafumi Kimura , Chishio Koshimizu
- 申请人: TOKYO ELECTRON LIMITED
- 申请人地址: JP Tokyo
- 专利权人: TOKYO ELECTRON LIMITED
- 当前专利权人: TOKYO ELECTRON LIMITED
- 当前专利权人地址: JP Tokyo
- 代理机构: Rothwell, Figg, Ernst & Manbeck, P.C.
- 优先权: JP2012-191788 20120831
- 主分类号: H01Q1/26
- IPC分类号: H01Q1/26 ; H01J7/24 ; H05H1/46 ; H01J37/32
摘要:
A plasma processing apparatus includes: a mounting table, disposed in a processing chamber, configured to mount thereon the substrate; an inductively coupled antenna disposed outside the processing chamber to be opposite to the mounting table, the inductively coupled antenna being connected to a high frequency power supply; and a window member forming a wall of the processing chamber which faces the inductively coupled antenna. The window member includes a plurality of conductive windows made of a conductive material, and dielectric portions disposed between the conductive windows. The inductively coupled antenna is extended in a predetermined direction on the window member and electrically connected to one of the conductive windows, and electrical connection by conductors is sequentially performed from the one of the conductive windows to the other conductive windows in the same direction as an extension direction of the inductively coupled antenna.
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