发明授权
US09168623B2 Biaxial linear-motion micro drive apparatus 有权
双轴线性运动微驱动装置

Biaxial linear-motion micro drive apparatus
摘要:
A biaxial linear-motion micro drive apparatus includes: a mounting base A on an upper surface of a Z-direction sliding base; a Z-direction micro actuator fixed within the mounting base A and connected with a Z-direction micro-motion platform connected with an X-direction sliding base; Z-direction guide rail strips arranged on the Z-direction sliding; two Z-direction guide rail blocks provided on one Z-direction guide rail strip fixedly mounted on a lower surface of the X-direction sliding base; a mounting base B provided on an upper surface of the X-direction sliding base; an X-direction micro actuator in the mounting base B and connected with an X-direction micro-motion platform connected with an XZ biaxial motion platform; two X-direction guide rail strips arranged on the upper surface of the X-direction sliding base; two X-direction guide rail blocks provided on each X-direction guide rail strip mounted on a lower surface of the XZ biaxial motion platform.
公开/授权文献
信息查询
0/0