Invention Grant
- Patent Title: Capacitive pressure sensor and a method of fabricating the same
- Patent Title (中): 电容式压力传感器及其制造方法
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Application No.: US14376447Application Date: 2012-12-17
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Publication No.: US09170164B2Publication Date: 2015-10-27
- Inventor: Dieter Naegele-Preissmann , J. V. Sreedhar
- Applicant: Dieter Naegele-Preissmann , J. V. Sreedhar
- Agent Mark M. Friedman
- Priority: IN411/CHE/2012 20120203
- International Application: PCT/IN2012/000825 WO 20121217
- International Announcement: WO2013/118139 WO 20130815
- Main IPC: G01L1/14
- IPC: G01L1/14 ; G01L9/00 ; G01L19/06 ; B81C1/00

Abstract:
The invention discloses a capacitive pressure sensor and a method of fabricating the same. The capacitive pressure sensor includes a fixed plate configured as a back plate, a movable plate configured as diaphragm for sensing pressure, wherein a cavity is formed between the fixed plate and the movable plate, an isolation layer between the fixed plate and the movable plate and electrical contacts thereof for minimizing the leakage current, plurality of damping holes for configuring the contour of the fixed plate as the deflected diaphragm when pressure is exerted, a vent hole extending to the cavity having resistive air path for providing equilibrium to the diaphragm and an extended back chamber for increasing the sensitivity of the capacitive pressure sensor. The capacitive pressure sensor is also configured for minimizing parasitic capacitance.
Public/Granted literature
- US20140374858A1 CAPACITIVE PRESSURE SENSOR AND A METHOD OF FABRICATING THE SAME Public/Granted day:2014-12-25
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