Invention Grant
- Patent Title: Three-dimensional nonvolatile memory device
- Patent Title (中): 三维非易失性存储器件
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Application No.: US14331582Application Date: 2014-07-15
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Publication No.: US09171860B2Publication Date: 2015-10-27
- Inventor: Soodoo Chae , Myoungbum Lee
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR
- Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee Address: KR
- Agency: Onello & Mello, LLP
- Priority: KR10-2008-0121886 20081203; KR10-2009-0049950 20090605
- Main IPC: H01L27/115
- IPC: H01L27/115

Abstract:
A three-dimensional nonvolatile memory device and a method for fabricating the same include a semiconductor substrate, a plurality of active pillars, and a plurality of gate electrodes. The semiconductor substrate includes a memory cell region and a contact region. The active pillars extend in the memory cell region perpendicular to the semiconductor substrate. The gate electrodes include a first gate electrode and a second gate electrode. The first gate electrode is disposed on the memory cell region to intersect the active pillars. The second gate electrode is disposed on the contact region, connected to the first gate electrode and comprising metal material.
Public/Granted literature
- US20140327067A1 Three-Dimensional Nonvolatile Memory Device Public/Granted day:2014-11-06
Information query
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