Invention Grant
US09172064B2 Mask for deposition and method for manufacturing organic light emitting diode display using the same
有权
用于沉积的掩模和用于制造使用其的有机发光二极管显示器的方法
- Patent Title: Mask for deposition and method for manufacturing organic light emitting diode display using the same
- Patent Title (中): 用于沉积的掩模和用于制造使用其的有机发光二极管显示器的方法
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Application No.: US13899531Application Date: 2013-05-21
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Publication No.: US09172064B2Publication Date: 2015-10-27
- Inventor: Jung-Min Lee , Choong-Ho Lee
- Applicant: SAMSUNG DISPLAY CO., LTD.
- Applicant Address: KR Yongin-si
- Assignee: Samsung Display Co., Ltd.
- Current Assignee: Samsung Display Co., Ltd.
- Current Assignee Address: KR Yongin-si
- Agency: Christie, Parker & Hale, LLP
- Priority: KR10-2012-0063224 20120613
- Main IPC: H01L51/56
- IPC: H01L51/56 ; H01L51/00 ; C23C14/04 ; H01L51/50

Abstract:
A deposition mask for forming an organic layer pattern of an organic light emitting diode (OLED) display includes a base member having a first surface facing a substrate of the OLED display, and a second surface facing a side opposite to the first surface, and including a plurality of openings passing through the first surface and the second surface for forming the organic layer pattern. The opening has a pair of first side walls and a pair of second side walls. Each side wall of the openings has an inclination surface inclined with respect to a thickness direction of the base member, and when measuring an inclination angle of the inclination surface with reference to the first surface of the base member, the inclination angle of the first side wall and the inclination angle of the second side wall are different from each other.
Public/Granted literature
- US20130337588A1 MASK FOR DEPOSITION AND METHOD FOR MANUFACTURING ORGANIC LIGHT EMITTING DIODE DISPLAY USING THE SAME Public/Granted day:2013-12-19
Information query
IPC分类: