Invention Grant
US09174837B2 System and method for detecting surface charges of a MEMS device
有权
用于检测MEMS器件的表面电荷的系统和方法
- Patent Title: System and method for detecting surface charges of a MEMS device
- Patent Title (中): 用于检测MEMS器件的表面电荷的系统和方法
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Application No.: US13435236Application Date: 2012-03-30
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Publication No.: US09174837B2Publication Date: 2015-11-03
- Inventor: Fang Liu , Kuang L. Yang
- Applicant: Fang Liu , Kuang L. Yang
- Applicant Address: US MA Norwood
- Assignee: Analog Devices, Inc.
- Current Assignee: Analog Devices, Inc.
- Current Assignee Address: US MA Norwood
- Agency: Sunstein Kann Murphy & Timbers LLP
- Main IPC: G01R27/26
- IPC: G01R27/26 ; G01L9/00 ; B81B7/00 ; G01R29/24

Abstract:
A method for measuring retained surface charges within a MEMS device includes performing an initial voltage sweep on the MEMS device, and recording the capacitance between a first and second electrode of the MEMS device. The method may then (1) apply a stress signal to the MEMS device that causes a first and/or second electrode within the MEMS device to retain a surface charge, and (2) perform at least one additional voltage sweep on the MEMS device. The method may record the capacitance during the additional voltage sweep(s), and calculate a C-V center voltage shift based upon the data obtained during the initial voltage sweep and additional voltage sweep. The voltage shift is representative of the retained surface charge.
Public/Granted literature
- US20130257456A1 System and Method for Detecting Surface Charges of a MEMS Device Public/Granted day:2013-10-03
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