Invention Grant
US09177827B2 Etchant and method for manufacturing semiconductor device using same
有权
用于制造使用其的半导体器件的蚀刻剂和方法
- Patent Title: Etchant and method for manufacturing semiconductor device using same
- Patent Title (中): 用于制造使用其的半导体器件的蚀刻剂和方法
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Application No.: US13518714Application Date: 2010-12-24
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Publication No.: US09177827B2Publication Date: 2015-11-03
- Inventor: Akira Hosomi
- Applicant: Akira Hosomi
- Applicant Address: JP Tokyo
- Assignee: MITSUBISHI GAS CHEMICAL COMPANY, INC.
- Current Assignee: MITSUBISHI GAS CHEMICAL COMPANY, INC.
- Current Assignee Address: JP Tokyo
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2009-296078 20091225
- International Application: PCT/JP2010/073367 WO 20101224
- International Announcement: WO2011/078335 WO 20110630
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L21/3213 ; C23F1/02 ; C23F1/18 ; C23F1/26 ; C23F1/44 ; H01L23/00 ; H01L23/525

Abstract:
Disclosed are an etchant which is used for the manufacture of a semiconductor device using a semiconductor substrate having an electrode and which is capable of selectively etching copper without etching nickel, and a method for manufacturing a semiconductor device using the same. Specifically disclosed are an etchant to be used for the manufacture of a semiconductor device using a semiconductor substrate having an electrode, including hydrogen peroxide, an organic acid, and an organic phosphonic acid, wherein the organic acid is at least one member selected from citric acid and malic acid; a content of hydrogen peroxide is from 0.75 to 12% by mass; a content of the organic acid is from 0.75 to 25% by mass; and a content of the organic phosphonic acid is from 0.0005 to 1% by mass, and a method for manufacturing a semiconductor device using the etchant.
Public/Granted literature
- US20120270396A1 ETCHANT AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE USING SAME Public/Granted day:2012-10-25
Information query
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