Invention Grant
- Patent Title: Optical absorbers
- Patent Title (中): 光吸收器
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Application No.: US14105797Application Date: 2013-12-13
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Publication No.: US09177876B2Publication Date: 2015-11-03
- Inventor: Haifan Liang , Jessica Eid , Minh Huu Le , Jeroen Van Duren
- Applicant: Intermolecular, Inc.
- Applicant Address: US CA San Jose
- Assignee: Intermolecular, Inc.
- Current Assignee: Intermolecular, Inc.
- Current Assignee Address: US CA San Jose
- Main IPC: H01L21/66
- IPC: H01L21/66 ; H01L31/032 ; H01L31/0749

Abstract:
Optical absorbers and methods are disclosed. The methods comprise depositing a plurality of precursor layers comprising one or more of Cu, Ga, and In on a substrate, and heating the layers in a chalcogenizing atmosphere. The plurality of precursor layers can be one or more sets of layers comprising at least two layers, wherein each layer in each set of layers comprises one or more of Cu, Ga, and In exhibiting a single phase. The layers can be deposited using two or three targets selected from Ag and In containing less than 21% In by weight, Cu and Ga where the Cu and Ga target comprises less than 45% Ga by weight, Cu(In,Ga), wherein the Cu(In,Ga) target has an atomic ratio of Cu to (In+Ga) greater than 2 and an atomic ratio of Ga to (Ga+In) greater than 0.5, elemental In, elemental Cu, and In2Se3 and In2S3.
Public/Granted literature
- US20140273311A1 Optical Absorbers Public/Granted day:2014-09-18
Information query
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