发明授权
- 专利标题： Gas sensor and manufacturing method thereof
- 专利标题（中）： 气体传感器及其制造方法
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申请号： US14163577申请日： 2014-01-24
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公开(公告)号： US09178032B2公开(公告)日： 2015-11-03
- 发明人: Young-Jun Yu , Hongkyw Choi , Jin Sik Choi , Kwang Hyo Chung , Jin Tae Kim , Doo Hyeb Youn , Choon Gi Choi
- 申请人： Electronics and Telecommunications Research Institute
- 申请人地址： KR Daejeon
- 专利权人： ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE
- 当前专利权人： ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE
- 当前专利权人地址： KR Daejeon
- 代理机构： Rabin & Berdo, P.C.
- 优先权： KR10-2013-0016535 20130215; KR10-2013-0101957 20130827
- 主分类号： G01N27/414
- IPC分类号： G01N27/414 ; H01L29/66 ; G01N27/12
摘要：
Provided is a gas sensor including a substrate, a sensing electrode extended in a first direction on the substrate, and a plurality of heaters disposed in a second direction crossing the first direction on the substrate. The plurality of heaters is separated at both sides of the sensing electrode. The plurality of heaters includes graphene.
公开/授权文献
- US20140231933A1 GAS SENSOR AND MANUFACTURING METHOD THEREOF 公开/授权日：2014-08-21
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