Invention Grant
- Patent Title: Gas sensor and manufacturing method thereof
- Patent Title (中): 气体传感器及其制造方法
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Application No.: US14163577Application Date: 2014-01-24
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Publication No.: US09178032B2Publication Date: 2015-11-03
- Inventor: Young-Jun Yu , Hongkyw Choi , Jin Sik Choi , Kwang Hyo Chung , Jin Tae Kim , Doo Hyeb Youn , Choon Gi Choi
- Applicant: Electronics and Telecommunications Research Institute
- Applicant Address: KR Daejeon
- Assignee: ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE
- Current Assignee: ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE
- Current Assignee Address: KR Daejeon
- Agency: Rabin & Berdo, P.C.
- Priority: KR10-2013-0016535 20130215; KR10-2013-0101957 20130827
- Main IPC: G01N27/414
- IPC: G01N27/414 ; H01L29/66 ; G01N27/12
Abstract:
Provided is a gas sensor including a substrate, a sensing electrode extended in a first direction on the substrate, and a plurality of heaters disposed in a second direction crossing the first direction on the substrate. The plurality of heaters is separated at both sides of the sensing electrode. The plurality of heaters includes graphene.
Public/Granted literature
- US20140231933A1 GAS SENSOR AND MANUFACTURING METHOD THEREOF Public/Granted day:2014-08-21
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