Invention Grant
- Patent Title: Morphology control of ultra-thin MeOx layer
- Patent Title (中): 超薄MeOx层的形态控制
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Application No.: US14624209Application Date: 2015-02-17
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Publication No.: US09178140B2Publication Date: 2015-11-03
- Inventor: Federico Nardi , Yun Wang
- Applicant: Intermolecular Inc. , Kabushiki Kaisha Toshiba , SanDisk 3D LLC
- Applicant Address: US CA San Jose JP Tokyo US CA Milpitas
- Assignee: Intermolecular, Inc.,Kabushiki Kaisha Toshiba,SanDisk 3D LLC
- Current Assignee: Intermolecular, Inc.,Kabushiki Kaisha Toshiba,SanDisk 3D LLC
- Current Assignee Address: US CA San Jose JP Tokyo US CA Milpitas
- Main IPC: H01L29/02
- IPC: H01L29/02 ; H01L45/00 ; H01L51/00 ; H01L27/24

Abstract:
A nonvolatile memory device contains a resistive switching memory element with improved device switching performance and life and methods for forming the same. The nonvolatile memory device has a first layer on a substrate, a resistive switching layer on the first layer, and a second layer. The resistive switching layer is disposed between the first layer and the second layer and the resistive switching layer comprises a material having the same morphology as the top surface of the first layer. A method of forming a nonvolatile memory element in a ReRAM device includes forming a resistive switching layer on a first layer and forming a second layer, so that the resistive switching layer is disposed between the first layer and the second layer. The resistive switching layer comprises a material formed with the same morphology as the top surface of the first layer.
Public/Granted literature
- US20150162527A1 Morphology control of ultra-thin MeOx layer Public/Granted day:2015-06-11
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