发明授权
- 专利标题: Pre-colored methodology of multiple patterning
- 专利标题(中): 多色图案的预色方法
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申请号: US14218001申请日: 2014-03-18
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公开(公告)号: US09183341B2公开(公告)日: 2015-11-10
- 发明人: Yen-Huei Chen , Hung-Jen Liao , Jonathan Tsung-Yung Chang
- 申请人: Taiwan Semiconductor Manufacturing Co., Ltd.
- 申请人地址: TW Hsin-Chu
- 专利权人: Taiwan Semiconductor Manufacturing Co., Ltd.
- 当前专利权人: Taiwan Semiconductor Manufacturing Co., Ltd.
- 当前专利权人地址: TW Hsin-Chu
- 代理机构: Eschweiler & Associates, LLC
- 主分类号: G06F17/50
- IPC分类号: G06F17/50
摘要:
Some embodiments relate to a system that pre-colors word lines and control lines within a memory cell to avoid timing delays that result from processing variations introduced through multiple patterning lithography processes. The system has a memory element that stores a graphical IC layout with a memory circuit having layout features including a plurality of word lines and a plurality of Y-control lines. A pre-coloring element pre-colors one or more of the plurality of word lines and Y-control lines, to indicate that pre-colored word lines and Y-control lines are to be formed on a same mask of a multiple mask set used for a multiple patterning lithography process. A decomposition element assigns different colors to uncolored layout features of the memory circuit, to indicate that different colored memory features are to be formed on different masks of the multiple mask set.
公开/授权文献
- US20140201692A1 PRE-COLORED METHODOLOGY OF MULTIPLE PATTERNING 公开/授权日:2014-07-17
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