Invention Grant
- Patent Title: Apparatus for storing substrates
- Patent Title (中): 用于存储基板的装置
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Application No.: US14185041Application Date: 2014-02-20
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Publication No.: US09184075B2Publication Date: 2015-11-10
- Inventor: Ji-Eun Kim , Dong-Yoon So , Han-Soo Kim
- Applicant: Samsung Display Co., Ltd.
- Applicant Address: KR Yongin, Gyeonggi-Do
- Assignee: SAMSUNG DISPLAY CO., LTD.
- Current Assignee: SAMSUNG DISPLAY CO., LTD.
- Current Assignee Address: KR Yongin, Gyeonggi-Do
- Agency: Lee & Morse, P.C.
- Priority: KR10-2013-0018172 20130220
- Main IPC: B65D85/48
- IPC: B65D85/48 ; H01L21/673

Abstract:
An apparatus for storing a substrate on which a pattern is formed includes a main body storing the substrate, a first pad located at the bottom of the main body and including a first groove supporting one edge of the substrate, a second pad neighboring the first pad and including a second groove supporting the center of the substrate, and a third pad spaced from the first pad, the second pad being disposed between the first and third pads, the third pad including a third groove supporting the other edge of the substrate.
Public/Granted literature
- US20140231306A1 APPARATUS FOR STORING SUBSTRATES Public/Granted day:2014-08-21
Information query
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