发明授权
US09184295B2 Method for manufacturing a suspended membrane and dual-gate MOS transistor
有权
制造悬浮膜和双栅极MOS晶体管的方法
- 专利标题: Method for manufacturing a suspended membrane and dual-gate MOS transistor
- 专利标题(中): 制造悬浮膜和双栅极MOS晶体管的方法
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申请号: US14077724申请日: 2013-11-12
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公开(公告)号: US09184295B2公开(公告)日: 2015-11-10
- 发明人: Stéphane Monfray , Thomas Skotnicki
- 申请人: STMicroelectronics (Crolles 2) SAS
- 申请人地址: FR Crolles
- 专利权人: STMicroelectronics (Crolles 2) SAS
- 当前专利权人: STMicroelectronics (Crolles 2) SAS
- 当前专利权人地址: FR Crolles
- 代理机构: Seed IP Law Group PLLC
- 优先权: FR0958280 20091123
- 主分类号: H01L29/786
- IPC分类号: H01L29/786
摘要:
A method for manufacturing a suspended membrane in a single-crystal semiconductor substrate, including the steps of: forming in the substrate an insulating ring delimiting an active area, removing material from the active area, successively forming in the active area a first and a second layers, the second layer being a single-crystal semiconductor layer, etching a portion of the internal periphery of said ring down to a depth greater than the thickness of the second layer, removing the first layer so that the second layer formed a suspended membrane anchored in the insulating ring.
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