Invention Grant
- Patent Title: Mask assembly for thin film vapor deposition and manufacturing method thereof
- Patent Title (中): 薄膜蒸镀掩模组件及其制造方法
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Application No.: US14078008Application Date: 2013-11-12
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Publication No.: US09187817B2Publication Date: 2015-11-17
- Inventor: Yong-Hwan Kim
- Applicant: Samsung Display Co., Ltd.
- Applicant Address: KR Samsung-ro, Giheung-Gu, Yongin-si, Gyeonggi-Do
- Assignee: Samsung Display Co., Ltd.
- Current Assignee: Samsung Display Co., Ltd.
- Current Assignee Address: KR Samsung-ro, Giheung-Gu, Yongin-si, Gyeonggi-Do
- Agent Robert E. Bushnell, Esq.
- Priority: KR10-2012-0129596 20121115
- Main IPC: B05C11/00
- IPC: B05C11/00 ; C23C14/04 ; H01L51/00

Abstract:
A mask assembly for a thin film deposition includes: a frame main body forming an opening; a plurality of unit masks having both ends fixed to the frame main body in a state that a tension force is applied in a first direction; and an end tension unit installed to the frame main body. The end tension unit moves according to a second direction crossing the first direction between two neighboring unit masks among a plurality of unit masks for tensioning of the unit mask in the second direction.
Public/Granted literature
- US20140130735A1 MASK ASSEMBLY FOR THIN FILM VAPOR DEPOSITION AND MANUFACTURING METHOD THEREOF Public/Granted day:2014-05-15
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