Invention Grant
US09188909B2 Method for monitoring developer solution and a developing apparatus
有权
用于监测显影剂溶液的方法和显影装置
- Patent Title: Method for monitoring developer solution and a developing apparatus
- Patent Title (中): 用于监测显影剂溶液的方法和显影装置
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Application No.: US13973057Application Date: 2013-08-22
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Publication No.: US09188909B2Publication Date: 2015-11-17
- Inventor: Can Wang , Weijie Wang , Xuan He
- Applicant: BOE Technology Group Co., Ltd.
- Applicant Address: CN Beijing
- Assignee: BOE TECHNOLOGY GROUP CO., LTD.
- Current Assignee: BOE TECHNOLOGY GROUP CO., LTD.
- Current Assignee Address: CN Beijing
- Agency: Ladas & Parry LLP
- Priority: CN201210307188 20120824
- Main IPC: G03G15/10
- IPC: G03G15/10 ; G03F7/32

Abstract:
A developing apparatus comprises: a photodetection unit, which emits detecting light toward the development area of the substrate to be developed within a scheduled time after the substrate to be developed is immersed into the developer solution; and a processing unit electrically coupled with the photodetection unit for determining the time interval which it takes for development to occur in the development area by means of the detecting light, and for determining that the developer solution is failed if the development time interval is determined to be out of the preset time range. A method for monitoring the developer solution is also provided.
Public/Granted literature
- US20140055760A1 Method For Monitoring Developer Solution And A Developing Apparatus Public/Granted day:2014-02-27
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