Invention Grant
US09194743B2 Raman spectroscopy using diffractive MEMS 有权
使用衍射MEMS的拉曼光谱

Raman spectroscopy using diffractive MEMS
Abstract:
A Raman spectrometer including a laser excitation source, edge filters, and detection optics that direct light into a spectrograph. A spectrograph containing a dispersive element and optics that directs various wavelengths of light onto a segmented diffractive MEMS light modulator array. The MEMS array, depending on actuation state, directs light either to or away from a single detector. Control electronics drive the MEMS light modulator for either sequential wavelength measurement or multiplexed wavelength measurement (Hadamard for example).
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